EXPOSURE DEVICE, EXPOSURE METHOD AND METHOD FOR MANUFACTURING DISPLAY PANEL SUBSTRATE

PROBLEM TO BE SOLVED: To supply a large amount of drawing data to drive circuits of a spatial optical modulator at a high speed, and correct variations in exposure intensity due to distortion of optical components included in an irradiation optical system of a light beam irradiation device to improv...

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Bibliographische Detailangaben

Hauptverfasser:	MOCHIZUKI MASAAKI, HONDA HIDEYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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