CLEANING APPARATUS
PROBLEM TO BE SOLVED: To provide a cleaning apparatus which prevents, even when scattered things from a surface of an object to be cleaned scatter in different directions, reattachment of the scattered things when cleaning the object to be cleaned with a cleaning liquid jetted on the surface.SOLUTIO...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a cleaning apparatus which prevents, even when scattered things from a surface of an object to be cleaned scatter in different directions, reattachment of the scattered things when cleaning the object to be cleaned with a cleaning liquid jetted on the surface.SOLUTION: This cleaning apparatus 1 is provided with: a rotating holding unit 2 that holds and rotates a lens 15; a cleaning liquid jetting unit 7 that jets the cleaning liquid into a spot shaped cleaning area on the lens 15 held by the rotating holding unit 2; a compressed air jetting unit 8 that forms a layered air current 17 incident to a convex lens surface 15a so as to cover the area around the cleaning area from the rear side in the direction of movement of the cleaning area relative to the center of rotation; and a lifting stage 6 that moves the cleaning area relatively toward the peripheral side from the center of rotation of the lens 15 by moving either or both of the rotating holding unit 2 and the cleaning liquid jetting unit 7, and also moves the incident position of the layered air current 17 relatively by tracking the relative movement of the cleaning area. |
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