PEELING DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

PROBLEM TO BE SOLVED: To provide a peeling device capable of minimizing damage on a substrate.SOLUTION: A peeling device 10 which peels a boundary surface 8 of a substrate 2 and a reinforcing plate 3 of the substrate 2, in order, from one end side toward the other end side comprises support means 20...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UTSUGI HIROSHI, TAKIUCHI KEI, ITO YASUNORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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