PEELING DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

PROBLEM TO BE SOLVED: To provide a peeling device capable of minimizing damage on a substrate.SOLUTION: A peeling device 10 which peels a boundary surface 8 of a substrate 2 and a reinforcing plate 3 of the substrate 2, in order, from one end side toward the other end side comprises support means 20...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UTSUGI HIROSHI, TAKIUCHI KEI, ITO YASUNORI
Format: Patent
Sprache:eng
Schlagworte:
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a peeling device capable of minimizing damage on a substrate.SOLUTION: A peeling device 10 which peels a boundary surface 8 of a substrate 2 and a reinforcing plate 3 of the substrate 2, in order, from one end side toward the other end side comprises support means 20 for supporting a first principal surface 6b of a laminate 6 including the substrate 2 and the reinforcing plate 3, a flexible plate 30 which sucks a second principal surface 6a of the laminate 6, a plurality of movable bodies 40 fixed onto the flexible plate 30 at intervals and movable independently for the support means 20, and a controller 80 which controls movement of the plurality of movable bodies 40. The controller 80 controls movement of the plurality of movable bodies 40 so that a boundary line 9 of a portion where the boundary surface 8 is peeled and a portion where the boundary surface 8 is not peeled is curved to protrude backward in the direction of movement, when the linear distance H between both ends of the boundary line 9 is longest.