PEELING DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
PROBLEM TO BE SOLVED: To provide a peeling device capable of minimizing damage on a substrate.SOLUTION: A peeling device 10 which peels a boundary surface 8 of a substrate 2 and a reinforcing plate 3 of the substrate 2, in order, from one end side toward the other end side comprises support means 20...
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| creator | UTSUGI HIROSHI TAKIUCHI KEI ITO YASUNORI |
| description | PROBLEM TO BE SOLVED: To provide a peeling device capable of minimizing damage on a substrate.SOLUTION: A peeling device 10 which peels a boundary surface 8 of a substrate 2 and a reinforcing plate 3 of the substrate 2, in order, from one end side toward the other end side comprises support means 20 for supporting a first principal surface 6b of a laminate 6 including the substrate 2 and the reinforcing plate 3, a flexible plate 30 which sucks a second principal surface 6a of the laminate 6, a plurality of movable bodies 40 fixed onto the flexible plate 30 at intervals and movable independently for the support means 20, and a controller 80 which controls movement of the plurality of movable bodies 40. The controller 80 controls movement of the plurality of movable bodies 40 so that a boundary line 9 of a portion where the boundary surface 8 is peeled and a portion where the boundary surface 8 is not peeled is curved to protrude backward in the direction of movement, when the linear distance H between both ends of the boundary line 9 is longest. |
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The controller 80 controls movement of the plurality of movable bodies 40 so that a boundary line 9 of a portion where the boundary surface 8 is peeled and a portion where the boundary surface 8 is not peeled is curved to protrude backward in the direction of movement, when the linear distance H between both ends of the boundary line 9 is longest.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC ; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS ; SEMICONDUCTOR DEVICES ; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130321&DB=EPODOC&CC=JP&NR=2013055307A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130321&DB=EPODOC&CC=JP&NR=2013055307A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>UTSUGI HIROSHI</creatorcontrib><creatorcontrib>TAKIUCHI KEI</creatorcontrib><creatorcontrib>ITO YASUNORI</creatorcontrib><title>PEELING DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE</title><description>PROBLEM TO BE SOLVED: To provide a peeling device capable of minimizing damage on a substrate.SOLUTION: A peeling device 10 which peels a boundary surface 8 of a substrate 2 and a reinforcing plate 3 of the substrate 2, in order, from one end side toward the other end side comprises support means 20 for supporting a first principal surface 6b of a laminate 6 including the substrate 2 and the reinforcing plate 3, a flexible plate 30 which sucks a second principal surface 6a of the laminate 6, a plurality of movable bodies 40 fixed onto the flexible plate 30 at intervals and movable independently for the support means 20, and a controller 80 which controls movement of the plurality of movable bodies 40. 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The controller 80 controls movement of the plurality of movable bodies 40 so that a boundary line 9 of a portion where the boundary surface 8 is peeled and a portion where the boundary surface 8 is not peeled is curved to protrude backward in the direction of movement, when the linear distance H between both ends of the boundary line 9 is longest.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE |
| title | PEELING DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE |
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