CONTINUOUS CASTING METHOD OF SILICON INGOT
PROBLEM TO BE SOLVED: To provide a continuous casting method of silicon ingots using electromagnetic induction, by which occurrence of dislocations can be suppressed while sufficiently suppressing production of residual stress.SOLUTION: A plurality of heaters for heat retention and a plurality of so...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a continuous casting method of silicon ingots using electromagnetic induction, by which occurrence of dislocations can be suppressed while sufficiently suppressing production of residual stress.SOLUTION: A plurality of heaters for heat retention and a plurality of soaking heaters are continuously arranged in stages under a bottomless cooling crucible. In accordance with a coordinate system with the lower end position of the cooling crucible as the origin and the vertical lower side as the positive, the vertical setting position of a thermometer for monitoring the temperature of the uppermost heater for heat retention is defined as a first position Z, the heater temperature at the first position Zis represented by T, the vertical setting position of a thermometer for monitoring the temperature of the uppermost soaking heater is defined as a second position Z, and the heater temperature at the second position Zis represented by T. The vertical setting position of each thermometer used for monitoring the temperature of each heater for heat retention between the first position Zand the second position Zis defined as Z. The output of each heater for heat retention is controlled so that the heater temperature T at each position Z satisfies conditions of expression (1). |
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