EXPOSURE APPARATUS AND EXPOSURE METHOD

PROBLEM TO BE SOLVED: To provide an exposure apparatus capable of converting vector data into raster data at high speed in real time.SOLUTION: The exposure apparatus includes: a vector data memory 1 for storing vector data deleted with duplicated data; sequence control means 4 for reading desired ve...

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Bibliographische Detailangaben
Hauptverfasser:	MAEDA YASUYUKI, TOBA TADANOBU, MOCHIZUKI MASAAKI, HIRANO KATSUNORI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MATERIALS THEREFOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an exposure apparatus capable of converting vector data into raster data at high speed in real time.SOLUTION: The exposure apparatus includes: a vector data memory 1 for storing vector data deleted with duplicated data; sequence control means 4 for reading desired vector data information from vector data stored in the vector data memory 1 on the basis of a sequence control instruction; coordinate arithmetic means 5 for converting the vector data information read by the sequence control means 4 into raster data; and a driver 11 for performing exposure on the basis of the raster data converted by the coordinate arithmetic means 5.