ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD

PROBLEM TO BE SOLVED: To provide an electrical characteristic acquisition evaluation method capable of performing a stable electrical characteristic acquisition evaluation without causing any problem on a sample side and a probe side.SOLUTION: An electrical characteristic acquisition evaluation meth...

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Bibliographische Detailangaben

1. Verfasser:	SAWAI NOBUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SEMICONDUCTOR DEVICES TESTING
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