ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD

PROBLEM TO BE SOLVED: To provide an electrical characteristic acquisition evaluation method capable of performing a stable electrical characteristic acquisition evaluation without causing any problem on a sample side and a probe side.SOLUTION: An electrical characteristic acquisition evaluation method includes the steps of: exposing a contact hole 21 corresponding to a surface side electrode of a laminate body; forming a convex structure 22 through filling the exposed contact hole 21 with a conductive substance; recognizing a location of the convex structure 22 through making a cantilever contact with a region including the convex structure 22 with an intermittent contact measuring method; and acquiring an electrical characteristic through pressing the cantilever in a central axis direction of the convex structure 22.