ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD
PROBLEM TO BE SOLVED: To provide an electrical characteristic acquisition evaluation method capable of performing a stable electrical characteristic acquisition evaluation without causing any problem on a sample side and a probe side.SOLUTION: An electrical characteristic acquisition evaluation meth...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | SAWAI NOBUHIRO |
| description | PROBLEM TO BE SOLVED: To provide an electrical characteristic acquisition evaluation method capable of performing a stable electrical characteristic acquisition evaluation without causing any problem on a sample side and a probe side.SOLUTION: An electrical characteristic acquisition evaluation method includes the steps of: exposing a contact hole 21 corresponding to a surface side electrode of a laminate body; forming a convex structure 22 through filling the exposed contact hole 21 with a conductive substance; recognizing a location of the convex structure 22 through making a cantilever contact with a region including the convex structure 22 with an intermittent contact measuring method; and acquiring an electrical characteristic through pressing the cantilever in a central axis direction of the convex structure 22. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2013040842A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2013040842A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2013040842A3</originalsourceid><addsrcrecordid>eNrjZDB39XF1DgnydHb0UXD2cAxydA5xDfIMDvF0VnB0Dgz1DPYM8fT3U3ANc_QJdQQzfV1DPPxdeBhY0xJzilN5oTQ3g5Kba4izh25qQX58anFBYnJqXmpJvFeAkYGhsYGJgYWJkaMxUYoArW0o5Q</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD</title><source>esp@cenet</source><creator>SAWAI NOBUHIRO</creator><creatorcontrib>SAWAI NOBUHIRO</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide an electrical characteristic acquisition evaluation method capable of performing a stable electrical characteristic acquisition evaluation without causing any problem on a sample side and a probe side.SOLUTION: An electrical characteristic acquisition evaluation method includes the steps of: exposing a contact hole 21 corresponding to a surface side electrode of a laminate body; forming a convex structure 22 through filling the exposed contact hole 21 with a conductive substance; recognizing a location of the convex structure 22 through making a cantilever contact with a region including the convex structure 22 with an intermittent contact measuring method; and acquiring an electrical characteristic through pressing the cantilever in a central axis direction of the convex structure 22.</description><language>eng</language><subject>APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] ; BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MEASURING ; PHYSICS ; SCANNING-PROBE TECHNIQUES OR APPARATUS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130228&DB=EPODOC&CC=JP&NR=2013040842A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130228&DB=EPODOC&CC=JP&NR=2013040842A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SAWAI NOBUHIRO</creatorcontrib><title>ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD</title><description>PROBLEM TO BE SOLVED: To provide an electrical characteristic acquisition evaluation method capable of performing a stable electrical characteristic acquisition evaluation without causing any problem on a sample side and a probe side.SOLUTION: An electrical characteristic acquisition evaluation method includes the steps of: exposing a contact hole 21 corresponding to a surface side electrode of a laminate body; forming a convex structure 22 through filling the exposed contact hole 21 with a conductive substance; recognizing a location of the convex structure 22 through making a cantilever contact with a region including the convex structure 22 with an intermittent contact measuring method; and acquiring an electrical characteristic through pressing the cantilever in a central axis direction of the convex structure 22.</description><subject>APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>SCANNING-PROBE TECHNIQUES OR APPARATUS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB39XF1DgnydHb0UXD2cAxydA5xDfIMDvF0VnB0Dgz1DPYM8fT3U3ANc_QJdQQzfV1DPPxdeBhY0xJzilN5oTQ3g5Kba4izh25qQX58anFBYnJqXmpJvFeAkYGhsYGJgYWJkaMxUYoArW0o5Q</recordid><startdate>20130228</startdate><enddate>20130228</enddate><creator>SAWAI NOBUHIRO</creator><scope>EVB</scope></search><sort><creationdate>20130228</creationdate><title>ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD</title><author>SAWAI NOBUHIRO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2013040842A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2013</creationdate><topic>APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>SCANNING-PROBE TECHNIQUES OR APPARATUS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SAWAI NOBUHIRO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SAWAI NOBUHIRO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD</title><date>2013-02-28</date><risdate>2013</risdate><abstract>PROBLEM TO BE SOLVED: To provide an electrical characteristic acquisition evaluation method capable of performing a stable electrical characteristic acquisition evaluation without causing any problem on a sample side and a probe side.SOLUTION: An electrical characteristic acquisition evaluation method includes the steps of: exposing a contact hole 21 corresponding to a surface side electrode of a laminate body; forming a convex structure 22 through filling the exposed contact hole 21 with a conductive substance; recognizing a location of the convex structure 22 through making a cantilever contact with a region including the convex structure 22 with an intermittent contact measuring method; and acquiring an electrical characteristic through pressing the cantilever in a central axis direction of the convex structure 22.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_JP2013040842A |
| source | esp@cenet |
| subjects | APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SEMICONDUCTOR DEVICES TESTING |
| title | ELECTRICAL CHARACTERISTIC ACQUISITION EVALUATION METHOD |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T03%3A20%3A48IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SAWAI%20NOBUHIRO&rft.date=2013-02-28&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2013040842A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |