PARTITION STRUCTURE ATTACHED TO MOTOR AND VACUUM MOTOR

PROBLEM TO BE SOLVED: To provide a partition structure attached to a motor which does not discharge an impurity gas to a vacuum side space.SOLUTION: A fastening member and a sealing member are provided from the high pressure side toward the lower pressure side in this written order at a space betwee...

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Hauptverfasser: MUSHA KAZUHIRO, MINAMI NOBUFUMI
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creator MUSHA KAZUHIRO
MINAMI NOBUFUMI
description PROBLEM TO BE SOLVED: To provide a partition structure attached to a motor which does not discharge an impurity gas to a vacuum side space.SOLUTION: A fastening member and a sealing member are provided from the high pressure side toward the lower pressure side in this written order at a space between an opening and a transmission plate.
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subjects ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
GENERATION
MEASURING
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
PHYSICS
TARIFF METERING APPARATUS
TESTING
title PARTITION STRUCTURE ATTACHED TO MOTOR AND VACUUM MOTOR
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