PARTITION STRUCTURE ATTACHED TO MOTOR AND VACUUM MOTOR

PROBLEM TO BE SOLVED: To provide a partition structure attached to a motor which does not discharge an impurity gas to a vacuum side space.SOLUTION: A fastening member and a sealing member are provided from the high pressure side toward the lower pressure side in this written order at a space betwee...

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Bibliographische Detailangaben
Hauptverfasser:	MUSHA KAZUHIRO, MINAMI NOBUFUMI
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY GENERATION MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a partition structure attached to a motor which does not discharge an impurity gas to a vacuum side space.SOLUTION: A fastening member and a sealing member are provided from the high pressure side toward the lower pressure side in this written order at a space between an opening and a transmission plate.