HARDNESS TEST DEVICE

PROBLEM TO BE SOLVED: To provide a hardness test device in which occurrence of positional shift of an AF stage can be avoided at focus adjustment.SOLUTION: The hardness test device includes imaging means for imaging the surface of a sample, and the AF stage for moving up and down a sample stand on t...

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1. Verfasser: KOSHIMIZU FUMIHIKO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a hardness test device in which occurrence of positional shift of an AF stage can be avoided at focus adjustment.SOLUTION: The hardness test device includes imaging means for imaging the surface of a sample, and the AF stage for moving up and down a sample stand on the basis of image data imaged by the imaging means and focuses on the surface of the sample. The AF stage includes: a base member; a slider which is placed on the upper part of the base member and moves on the base member in one direction of the base member; driving means for moving the slider in the one direction; an elastic member connected to one end in the one direction of the table and exerts an energization force to the table in the one end direction; and a guiding section that restricts horizontal movement of the table by abutting the one end of the table, and rolling-guides the table at vertical movement of the table.