MECHANICAL SCRIBE DEVICE AND FILM THICKNESS MEASUREMENT DEVICE AND MECHANICAL SCRIBE METHOD

MECHANICAL SCRIBE DEVICE AND FILM THICKNESS MEASUREMENT DEVICE AND MECHANICAL SCRIBE METHOD

PROBLEM TO BE SOLVED: To provide a mechanical scribe device capable of determining the completion time appropriately when scribing a conductive film, and to provide a film thickness measurement device including the same, and a mechanical scribe method.SOLUTION: When forming an island part 13 separat...

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Bibliographische Detailangaben
Hauptverfasser: SHIBA TOMOSHI, TANAKA YASUZO, SATO SEIICHI, SAKAUCHI YUYA, NAKAO HIROTOSHI, ANDRE CYMONE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a mechanical scribe device capable of determining the completion time appropriately when scribing a conductive film, and to provide a film thickness measurement device including the same, and a mechanical scribe method.SOLUTION: When forming an island part 13 separated from the rest of a conductive film 11 by forming a groove 12 by scribing in the conductive film 11 deposited on a substrate 10, electric resistance between the island part 13 and the rest of a conductive film 11 is detected while scribing the conductive film 11, and a determination is made as to whether it is the completion time of scribing or not based on the detection results.