METHOD OF MANUFACTURING FIELD EMISSION DISPLAY USING SELECTIVE POSITION CONTROL OF ELECTRON EMISSION SOURCE

METHOD OF MANUFACTURING FIELD EMISSION DISPLAY USING SELECTIVE POSITION CONTROL OF ELECTRON EMISSION SOURCE

PROBLEM TO BE SOLVED: To provide a field emission display which precisely regulates the position of an electron emission source and is free from leakage between pixels.SOLUTION: A photoresist layer 140 is formed on a cathode electrode 110 and a catalyst layer 130 which are formed on a substrate 100,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JANG JIN, LYU JAE HWAN, PARK KYUAN
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a field emission display which precisely regulates the position of an electron emission source and is free from leakage between pixels.SOLUTION: A photoresist layer 140 is formed on a cathode electrode 110 and a catalyst layer 130 which are formed on a substrate 100, and is sintered after pattern formation, and then holes are formed at predetermined positions. In the holes, carbon nanotubes 150 are grown using plasma CVD. Further, spacers 162 are formed directly on electrodes using a photoresist 160 for division into pixel units, and leakage between the pixels is prevented.