MANUFACTURING METHOD FOR FLAT PANEL DISPLAY

PROBLEM TO BE SOLVED: To provide a manufacturing method for a flat panel display capable of maintaining display quality while performing heat treatment of electrodes, dielectrics or the like formed on a substrate at an exact temperature.SOLUTION: In a manufacturing method for a flat panel display, a...

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Bibliographische Detailangaben
Hauptverfasser: ASANO DAISHI, MARUYAMA KYOJI, MATSUMOTO HIDEJI, HORIUCHI KOYO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a manufacturing method for a flat panel display capable of maintaining display quality while performing heat treatment of electrodes, dielectrics or the like formed on a substrate at an exact temperature.SOLUTION: In a manufacturing method for a flat panel display, a substrate is mounted on a support material 31 to perform heat treatment. In the manufacturing method, liquid 32 volatilized at a heat treatment temperature or below is arranged between the substrate and the support material.