ROOM PRESSURE CONTROL SYSTEM

PROBLEM TO BE SOLVED: To promptly return an opening of a room pressure adjusting damper to a side of a setting proper opening range.SOLUTION: A room pressure control system mounts a constant air flow device qC on an air supply side of a target chamber 1, and includes a room pressure control means pC...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUKUMA TATSUYA, KOBUKI NAOYA, NOJIRI AKIYA, CHIBA MASAHIKO, YAGI HIDEYUKI
Format: Patent
Sprache:eng
Schlagworte:
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