ROOM PRESSURE CONTROL SYSTEM

PROBLEM TO BE SOLVED: To promptly return an opening of a room pressure adjusting damper to a side of a setting proper opening range.SOLUTION: A room pressure control system mounts a constant air flow device qC on an air supply side of a target chamber 1, and includes a room pressure control means pC...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUKUMA TATSUYA, KOBUKI NAOYA, NOJIRI AKIYA, CHIBA MASAHIKO, YAGI HIDEYUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To promptly return an opening of a room pressure adjusting damper to a side of a setting proper opening range.SOLUTION: A room pressure control system mounts a constant air flow device qC on an air supply side of a target chamber 1, and includes a room pressure control means pC for adjusting the opening b of the room pressure adjusting damper Vp mounted on an exhaust side of the target chamber 1 to adjust a room pressure p of the target chamber 1 to a setting room pressure ps. A setting air flow qss of the constant air flow device qC is changed based on the detected opening b of the room pressure adjusting damper Vp, and thereby an opening state control means bC is provided in which the opening b of the room pressure adjusting damper Vp is adjusted within the setting proper opening range in opening adjustment by the room pressure control means pC.