PIEZOELECTRIC VIBRATOR AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide: a piezoelectric vibrator suitable for downsizing and high performance in filters, oscillators, sensors and the like used for mobile communication equipment and the like; and a method of manufacturing the piezoelectric vibrator with satisfactory manufacturing efficiency.SOLUTION: A piezoelectric vibrator 1 includes a base part 3 and one or more vibration leg parts 4a and 4b protruded from the base part 3. Excitation electrodes 5a and 5b are formed at a part of at least two surfaces of the base part 3 and the vibration leg parts 4a and 4b. A surface exposed part 12 where the excitation electrodes 5a and 5b are not formed is etched to remove a part of the vibration leg parts 4a and 4b. A mass thereof is adjusted to calibrate a resonance frequency. A method of manufacturing the piezoelectric vibrator 1 includes the step of adjusting a resonance frequency by wet etching of the surface exposed part 12 of a piezoelectric vibration piece 1 in a state that the excitation electrodes 5a and 5b are partially formed on a surface of the piezoelectric vibration piece.