SOLID STATE IMAGE PICKUP DEVICE AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a solid state image pickup device and a method of manufacturing the same with which a smear reduction effect can be obtained.SOLUTION: In a solid state image pickup device having plural photodiodes 7 formed in a matrix form within a semiconductor substrate, a vertica...

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Bibliographische Detailangaben
Hauptverfasser: SHINDO MASAO, NAKAHARA MAYU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a solid state image pickup device and a method of manufacturing the same with which a smear reduction effect can be obtained.SOLUTION: In a solid state image pickup device having plural photodiodes 7 formed in a matrix form within a semiconductor substrate, a vertical transfer area 9 formed between the photodiode of respective columns within the semiconductor substrate, and a channel stop area 5 formed between the photodiode 7 of each column and the vertical transfer area 9 adjacent thereto, each channel stop area contains impurities, and the maximum value of the impurity concentration is set at a position nearer to the vertical transfer area than the center between the photodiode 7 of each column and the adjacent vertical transfer area 9, and the impurity concentration monotonically decreases from the position of the maximum value of the impurity concentration to the photodiode of each column.