SEMICONDUCTOR DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To easily manufacture a semiconductor device having high ON-state characteristics and high OFF-state characteristics without undermining layout freedom.SOLUTION: A semiconductor device manufacturing method comprises: forming a source electrode 2 and a drain electrode 3 on a sur...

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1. Verfasser: KAMO NOBUTAKA
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To easily manufacture a semiconductor device having high ON-state characteristics and high OFF-state characteristics without undermining layout freedom.SOLUTION: A semiconductor device manufacturing method comprises: forming a source electrode 2 and a drain electrode 3 on a surface of a semiconductor substrate 1 transparent with respect to visible light; forming a front side gate electrode 4 on the surface of the semiconductor substrate 1 between the source electrode 2 and the drain electrode 3; forming an alignment mark 5 in a region of the surface of the semiconductor substrate 1 other than between the source electrode 2 and the drain electrode 3; and aligning the semiconductor substrate 1 based on the alignment mark 5 seen through the semiconductor substrate 1 to form a reverse side gate electrode 6 at a location on a rear face of the semiconductor substrate 1 opposite to the front side gate electrode 4.