OPTICAL SCANNER AND MIRROR DRIVE UNIT
PROBLEM TO BE SOLVED: To provide an optical scanner capable of enlarging an inclination amount of a mirror part, and a mirror drive unit.SOLUTION: An optical scanner 2 is integrally formed with: a mirror part 3 driven to incline in two different directions; an electromechanical conversion element pa...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an optical scanner capable of enlarging an inclination amount of a mirror part, and a mirror drive unit.SOLUTION: An optical scanner 2 is integrally formed with: a mirror part 3 driven to incline in two different directions; an electromechanical conversion element part; and an elastic deformation part 12 for transmitting a displacement generated in the electromechanical conversion element part into the inclination of the mirror part 3. The electromechanical conversion element part is configured by superposing a plurality of electromechanical conversion element layers each of which is sandwiched between a positive electrode and a negative electrode. Nonactive parts 17A and 17B where the positive electrode and the negative electrode do not face each other, are configured to be fixed to a fixed frame 4. A mirror drive unit 1 uses the optical scanner 2. |
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