MICRO HEATER ELEMENT
PROBLEM TO BE SOLVED: To suppress deterioration of durability of a micro heater element having a membrane structure.SOLUTION: A micro heater element 1 includes: a support film 2 having multiple irregularities on both surfaces; a heating element 4 provided on one surface of the support film 2; and a...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To suppress deterioration of durability of a micro heater element having a membrane structure.SOLUTION: A micro heater element 1 includes: a support film 2 having multiple irregularities on both surfaces; a heating element 4 provided on one surface of the support film 2; and a substrate 3 which supports a periphery of the support film 2 and where a part facing the heating element 4 is removed. The heating element 4 has a structure in which a predetermined wiring pattern is repeated. The heating element 4 is formed in a recess 2V. Thus, the support film 2 has the heating element 4 in the recess 2V and does not have the heating element 4 in a protrusion 2M. |
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