HEAT TREATMENT DEVICE, AND SHEET SURFACE TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide a heat treatment device capable of enhancing in-plane uniformity of sheet temperature while displacing a sheet within a casing, and to provide a sheet surface treatment device including the heat treatment device.SOLUTION: A first deposition device 13, a second deposi...

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Bibliographische Detailangaben
Hauptverfasser: FUJIMOTO MIHO, YAMAGUCHI KOICHI, ODAGI HIDEYUKI, SUZUKI YASUMASA
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a heat treatment device capable of enhancing in-plane uniformity of sheet temperature while displacing a sheet within a casing, and to provide a sheet surface treatment device including the heat treatment device.SOLUTION: A first deposition device 13, a second deposition device 14, and a third deposition device 15 respectively include heat treatment devices for heating a sheet S passing through a casing inside the casing. The heat treatment device includes hot plates H1, H2 having heating surfaces facing to the sheet S and alternately repeating inside the casing forward movement in which the heating surface contacts the sheet S to make the sheet S follow the heating surface and backward movement in which the heating surface is separated from the sheet S to be returned to a position where the sheet S starts following. The heat treatment device also includes adsorption parts provided for the hot plates H1, H2 to adsorb the sheet S onto the heating surface by the forward movement and to release the adsorption before the backward movement.