RESIST STRIPPING AGENT AND STRIPPING METHOD USING THE SAME

PROBLEM TO BE SOLVED: To provide an inexpensive resist stripping agent showing excellent resist stripping property and inducing no corrosion in aluminum and copper.SOLUTION: A resist for copper wiring or a resist for aluminum wiring is stripped by using a resist stripping agent containing a monometh...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAHASHI FUMIHARU, HARA YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an inexpensive resist stripping agent showing excellent resist stripping property and inducing no corrosion in aluminum and copper.SOLUTION: A resist for copper wiring or a resist for aluminum wiring is stripped by using a resist stripping agent containing a monomethylamine formate.