FLUORINE-CONTAINING COMPOUND

PROBLEM TO BE SOLVED: To provide a new fluorine-containing compound useful as an additive for a resist composition for immersion exposure.SOLUTION: The fluorine-containing compound is represented by general formula (C-1). The fluorine-containing compound is a polymeric compound having a structural u...

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Bibliographische Detailangaben
Hauptverfasser:	TAKASU RYOICHI, MORI YOSHITAKA, DAZAI NAOHIRO, FURUYA SANAE, HIRANO TOMOYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS CHEMISTRY COMPOSITIONS BASED THEREON MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS METALLURGY ORGANIC CHEMISTRY ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a new fluorine-containing compound useful as an additive for a resist composition for immersion exposure.SOLUTION: The fluorine-containing compound is represented by general formula (C-1). The fluorine-containing compound is a polymeric compound having a structural unit obtained by cleavage of an ethylenic double bond of the fluorine-containing compound. In the formula, Q is a group obtained by removing a hydrogen atom from a monovalent hydrophilic group, Ris an organic group having a substituent containing a polymerizable group and an aromatic cyclic group optionally containing a fluorine atom, in which the polymerizable group is a group containing an ethylenic unsaturated double bond, Ris a group represented by -R-R. Ris an unsubstituted 1-9C alkylene group, Ris a 1-9C fluorine substituted alkyl group. In proviso, the sum of the carbon atom of the groups Rand Ris ≤10.