SURFACE SHAPE MEASUREMENT PROBE AND CALIBRATION METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a surface shape measurement probe for performing the calibration of stylus top end coordinates by a master ball and its calibration method.SOLUTION: A contactor 35 for calibration is mounted on the neighborhood of a stylus 31 of a surface shape measurement probe 30 s...

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Bibliographische Detailangaben
1. Verfasser: MICHIWAKI HIROKAZU
Format: Patent
Sprache:eng
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