SURFACE SHAPE MEASUREMENT PROBE AND CALIBRATION METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a surface shape measurement probe for performing the calibration of stylus top end coordinates by a master ball and its calibration method.SOLUTION: A contactor 35 for calibration is mounted on the neighborhood of a stylus 31 of a surface shape measurement probe 30 so that offset OFS between the top end of the stylus 31 and the contactor 35 for calibration can be measured, and a master ball 17 as the reference unit of a three-dimensional measurement instrument is measured by the contactor 35 for calibration so that the coordinate position of the contactor 35 for calibration can be found out, and the offset OFS is added to the coordinate position of the contactor 35 for calibration so that the coordinate position of the top end of the stylus 31 can be found out.