DEVICE FOR FIXING SUBSTRATE TO BE INSPECTED

PROBLEM TO BE SOLVED: To provide a device for fixing a substrate to be inspected which can carry out simple, fast, and accurate inspection.SOLUTION: A device for fixing a substrate to be inspected includes: a fixing jig for fixing the substrate to be inspected; a fixing jig connecting portion equipp...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WATABE KAZUHITO, MIZUGAKI HISAYOSHI
Format: Patent
Sprache:eng
Schlagworte:
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