DEVICE FOR FIXING SUBSTRATE TO BE INSPECTED

PROBLEM TO BE SOLVED: To provide a device for fixing a substrate to be inspected which can carry out simple, fast, and accurate inspection.SOLUTION: A device for fixing a substrate to be inspected includes: a fixing jig for fixing the substrate to be inspected; a fixing jig connecting portion equipped with a moving portion for moving the fixing jig in a vertical direction; a driving portion for moving the fixing jig connecting portion in a horizontal direction; a pressurizing portion for pressurizing the fixing jig to the substrate to be inspected in the vertical direction; and a pressurizing rail attached to the pressurizing portion, guiding the horizontal movement of the fixing jig, and transmitting the pressurizing force of the pressurizing portion to the fixing jig. The fixing jig has a supporting plate having a cavity portion at a center thereof, and two or more jig bodies provided on the supporting plate. At a generally center portion of the jig body, a rotating portion having a rotation shaft is provided. The rotating portion is installed and fixed on the supporting plate, thereby installing the jig body on the supporting plate so as to rotate about the rotation shaft. The jig body is provided with a pad at a tip end portion, and a spring at the other end portion between the supporting plate and the jig body.