VIBRATOR

PROBLEM TO BE SOLVED: To improve the productivity of a vibrator which vibrates a vibrating reed in the lateral direction by providing a lower electrode, a piezoelectric layer, and an upper electrode on an upper surface of the vibrating reed connecting with a support part and applying a control volta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIMADA YASUHIRO, TANIGUCHI FUMIHIKO, KAMIYAMA DAISUKE, TANAKA TATSUYA, HATANAKA MASAKAZU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To improve the productivity of a vibrator which vibrates a vibrating reed in the lateral direction by providing a lower electrode, a piezoelectric layer, and an upper electrode on an upper surface of the vibrating reed connecting with a support part and applying a control voltage between the upper electrode and the lower electrode.SOLUTION: According to this invention, a vibrator 12 includes: a support part 16; a vibrating reed 17 connecting with the support part 16; a lower electrode 21 provided on an upper surface of the vibrating reed 17; a piezoelectric layer 22 provided on the lower electrode 21 and having an outer peripheral end located at the inner side of an outer peripheral end of the lower electrode 21; and an upper electrode 20 provided on the piezoelectric layer 22 and having an outer peripheral end located at the inner side of an outer peripheral end of the piezoelectric layer 22. In the vibrator 12, the vibration direction of the vibrating reed 17 is adjusted by deflecting the piezoelectric layer 22 in the vibrating direction of the vibrating reed 17.