MICROFABRICATION PROCESSING AGENT AND MICROFABRICATION PROCESSING METHOD

PROBLEM TO BE SOLVED: To provide a microfabrication processing agent capable of microfabricating a silicon oxide film selectively when microfabricating a multilayer film laminating at least a silicon oxide film and a silicon nitride film, and to provide a microfabrication processing method using the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIYASHITA MASAYUKI, KUJIME TAKANOBU, FUTAI KEIICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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