REFLECTING DEVICE, COMMUNICATING PIPE, EXHAUST SYSTEM, METHOD FOR CLEANING THE SYSTEM, STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a reflecting device which can prevent intrusion of bounced particles into a processing chamber.SOLUTION: A reflecting device 36 comprises a reflector 38 consisting of a first discoid reflecting surface member 41 disposed in an exhaust manifold 16 oppositely to a TMP...

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Hauptverfasser: ENDO SHOSUKE, MORIYA TAKESHI, FUJIMORI MASAKI, SATO TETSUHARU, MURAKAMI TAKAHIRO, SUGAWARA EIICHI, KOBAYASHI YOSHIYUKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a reflecting device which can prevent intrusion of bounced particles into a processing chamber.SOLUTION: A reflecting device 36 comprises a reflector 38 consisting of a first discoid reflecting surface member 41 disposed in an exhaust manifold 16 oppositely to a TMP 18, and a second annular reflecting surface member 42 disposed on the periphery of the first reflecting surface member 41 and having a plane angle set to direct a rotating shaft 43 of the TMP 18.