METHOD FOR MANUFACTURING NOZZLE PLATE, NOZZLE PLATE, AND DROPLET DISCHARGE HEAD

PROBLEM TO BE SOLVED: To manufacture a nozzle plate for a droplet discharge head, which hardly causes deterioration in printing quality even in long-term use.SOLUTION: The method for manufacturing the nozzle plate 3 for the droplet discharge head having a fluorine-containing water-repellent layer 2d...

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Bibliographische Detailangaben
Hauptverfasser: SHIBATA KIYOTO, OOKA RYU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To manufacture a nozzle plate for a droplet discharge head, which hardly causes deterioration in printing quality even in long-term use.SOLUTION: The method for manufacturing the nozzle plate 3 for the droplet discharge head having a fluorine-containing water-repellent layer 2d on the surface includes at least steps of: vacuum-depositing a fluorine-containing organic silane compound having a hydrolyzable group; and introducing a material gas including water molecules and an acid into a vacuum deposition atmosphere.