PLASMA STERILIZATION APPARATUS

PROBLEM TO BE SOLVED: To provide a plasma sterilization apparatus with high plasma generation efficiency.SOLUTION: The plasma sterilization apparatus includes a high-frequency electrode 2, an earth electrode 3, a dielectric body 1, and a plasma generation module for generating plasma between the hig...

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Hauptverfasser: NEGISHI NOBUYUKI, TANDO TAKUMI, KOBAYASHI HIROYUKI, SUZUKI KEIZO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a plasma sterilization apparatus with high plasma generation efficiency.SOLUTION: The plasma sterilization apparatus includes a high-frequency electrode 2, an earth electrode 3, a dielectric body 1, and a plasma generation module for generating plasma between the high-frequency electrode 2 and the earth electrode 3, and an insulating spacer 6 is disposed between the earth electrode 3 and the dielectric body 1. It causes that the outer electric field increases more than the inner electric field of the dielectric body 1 and reactive power is reduced, and the plasma generation efficiency improves.