METHOD AND DEVICE OF PRE-PROCESSING POLYMER MATERIAL

PROBLEM TO BE SOLVED: To provide a method and a device of pre-processing a polymer material in a processing chamber (12).SOLUTION: The method includes to provide a component made of a polymer material in a processing chamber (12), and to introduce a carbon dioxide fluid in supercritical state therei...

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Hauptverfasser:	JERRY MICHAEL MAHL, KAREN ANNE CONNERY, THOMAS JOHN BERGMAN JR
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY CLEANING CLEANING IN GENERAL COMPOSITIONS BASED THEREON COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL PROCESSES OF COMPOUNDING INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SEPARATION THEIR PREPARATION OR CHEMICAL WORKING-UP THEIR RELEVANT APPARATUS TRANSPORTING WORKING-UP
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and a device of pre-processing a polymer material in a processing chamber (12).SOLUTION: The method includes to provide a component made of a polymer material in a processing chamber (12), and to introduce a carbon dioxide fluid in supercritical state therein. The component is exposed to the carbon dioxide fluid in order to extract nonvolatile organic residue contained therein. The carbon dioxide fluid contaminated containing the nonvolatile organic residue thus extracted is then taken out from the processing chamber so that the organic residue is not deposited on the component made of a polymer material by reducing the pressure in the processing chamber. Then, the component is taken out from the processing chamber (12).