APPARATUS AND METHOD FOR CLEANING POLYCRYSTALLINE SILICON

PROBLEM TO BE SOLVED: To provide an apparatus and a method for cleaning polycrystalline silicon, with which a vessel with polycrystalline silicon stored therein is smoothly and certainly transported between cleaning tanks, and with which working efficiency is improved and stable quality is maintaine...

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Bibliographische Detailangaben
1. Verfasser:	ATSUMI TETSUYA
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CLEANING CLEANING IN GENERAL COMPOUNDS THEREOF CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus and a method for cleaning polycrystalline silicon, with which a vessel with polycrystalline silicon stored therein is smoothly and certainly transported between cleaning tanks, and with which working efficiency is improved and stable quality is maintained.SOLUTION: In the apparatus 1 for cleaning polycrystalline silicon, the polycrystalline silicon S is immersed in the cleaning tanks 21-27 and cleaned while being stored in the vessel 3, and the apparatus 1 has a guide frame 5 to hold the vessel 3 in a loaded state on the inner bottom section of each of the cleaning tanks 21-27. A plurality of guide plates 52 to guide the introduction of the vessel 3 from the upper side is provided on the guide frame 5 while being inclined to a direction further apart from the holding center of the guide frame 5 as going to the upper side.