X-RAY GENERATOR AND CONTROL METHOD THEREOF

PROBLEM TO BE SOLVED: To radiate X-rays of a plurality of different energies and to suppress dispersion of energies of generated X-ray.SOLUTION: In an X-ray generator 14 included in an X-ray inspection apparatus 10, a particle accelerator 20 generates a charged particle beam for generating X-rays of a plurality of different energies and irradiates a target 22 with the charged particle beam to radiate X-rays. When the target 22 is irradiated with the charged particle beam, a single energy control device controls the particle accelerator 20 in each X-ray of different energy based on an X-ray dose per unit target current found out from a measurement value of a current flowing into the target 22 and a measurement value of a dose of X-rays radiated from the target 22.