PLASMA SPRAY METHOD FOR PRODUCING ION CONDUCTING MEMBRANE
PROBLEM TO BE SOLVED: To provide a plasma spray method capable of producing an ion conducting, in particular oxygen-permeable membrane solving problems of prior art and having improved quality.SOLUTION: In the plasma spray method for producing the ion conducting membrane having ion conductivity, the...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a plasma spray method capable of producing an ion conducting, in particular oxygen-permeable membrane solving problems of prior art and having improved quality.SOLUTION: In the plasma spray method for producing the ion conducting membrane having ion conductivity, the membrane is deposited as a layer (11) on a substrate (10) in a process chamber; starting materials (P) are sprayed on the substrate (10) surface in the form of process beams (2) using process gas (G); and the starting materials are injected to plasma at a low process pressure not higher than 10,000 Pa to be partially/completely melted therein. During the spraying, oxygen (O2; 22) is supplied to the process chamber (12) in an amount of at least 1%, preferably at least 2%, of the whole amount of the process gas flow. |
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