CONDUCTIVE SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a conductive substrate provided with a conductive thin film having conductivity and heat resistance at a low cost.SOLUTION: A conductive substrate is provided with the conductive thin film on a substrate, and the conductive thin film has a structure in which nanopart...

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Bibliographische Detailangaben
Hauptverfasser: HOJO MIKIKO, TAGUCHI YOSUKE
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a conductive substrate provided with a conductive thin film having conductivity and heat resistance at a low cost.SOLUTION: A conductive substrate is provided with the conductive thin film on a substrate, and the conductive thin film has a structure in which nanoparticles including group 6 transition metal carbide in the periodic table (long period type) and/or group 6 transition metal dioxide in the periodic table (long period type) are fused. A method for manufacturing the conductive substrate comprises the following steps (I) and (II): the step (I) of forming a thin film containing nanoparticles including group 6 transition metal carbide in the periodic table (long period type) on a substrate; and the step (II) of baking the thin film under an inert gas atmosphere and/or a reductive gas atmosphere.