LASER LIFT-OFF DEVICE
PROBLEM TO BE SOLVED: To remove an adverse effect of various granular dusts generated from a work through irradiation of the work with a laser light.SOLUTION: An annular wall portion 21 composed of an annular outer wall portion 21b and a ceiling wall portion 21a is provided for an outer edge of a st...
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| creator | NOMURA TORU SHINOYAMA KAZUKI |
| description | PROBLEM TO BE SOLVED: To remove an adverse effect of various granular dusts generated from a work through irradiation of the work with a laser light.SOLUTION: An annular wall portion 21 composed of an annular outer wall portion 21b and a ceiling wall portion 21a is provided for an outer edge of a stage portion 11 of a work stage 10 and the stage portion 11 is provided with a plurality of exhaust ports 12 coupled to an exhaust mechanism. The exhaust mechanism, for instance, a pump or a fan, is coupled to the exhaust ports 12 through piping 22, and suctions air inside the annular wall portion 21. Granular dusts generated as a result of irradiation of a work 1 with laser light are jetted together with gas from an edge portion of the work to an internal space A sectioned by the annular outer wall portion 21b and the ceiling wall portion 21a, are swept by a stream toward the exhaust ports 12, and are exhausted through the exhaust ports 12 provided for the stage portion 11. |
| format | Patent |
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The exhaust mechanism, for instance, a pump or a fan, is coupled to the exhaust ports 12 through piping 22, and suctions air inside the annular wall portion 21. Granular dusts generated as a result of irradiation of a work 1 with laser light are jetted together with gas from an edge portion of the work to an internal space A sectioned by the annular outer wall portion 21b and the ceiling wall portion 21a, are swept by a stream toward the exhaust ports 12, and are exhausted through the exhaust ports 12 provided for the stage portion 11.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CLADDING OR PLATING BY SOLDERING OR WELDING ; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MACHINE TOOLS ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; PERFORMING OPERATIONS ; SEMICONDUCTOR DEVICES ; SOLDERING OR UNSOLDERING ; TRANSPORTING ; WELDING ; WORKING BY LASER BEAM</subject><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20121004&DB=EPODOC&CC=JP&NR=2012191112A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20121004&DB=EPODOC&CC=JP&NR=2012191112A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NOMURA TORU</creatorcontrib><creatorcontrib>SHINOYAMA KAZUKI</creatorcontrib><title>LASER LIFT-OFF DEVICE</title><description>PROBLEM TO BE SOLVED: To remove an adverse effect of various granular dusts generated from a work through irradiation of the work with a laser light.SOLUTION: An annular wall portion 21 composed of an annular outer wall portion 21b and a ceiling wall portion 21a is provided for an outer edge of a stage portion 11 of a work stage 10 and the stage portion 11 is provided with a plurality of exhaust ports 12 coupled to an exhaust mechanism. 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The exhaust mechanism, for instance, a pump or a fan, is coupled to the exhaust ports 12 through piping 22, and suctions air inside the annular wall portion 21. Granular dusts generated as a result of irradiation of a work 1 with laser light are jetted together with gas from an edge portion of the work to an internal space A sectioned by the annular outer wall portion 21b and the ceiling wall portion 21a, are swept by a stream toward the exhaust ports 12, and are exhausted through the exhaust ports 12 provided for the stage portion 11.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
| recordid | cdi_epo_espacenet_JP2012191112A |
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| subjects | BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM |
| title | LASER LIFT-OFF DEVICE |
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