LASER LIFT-OFF DEVICE

PROBLEM TO BE SOLVED: To remove an adverse effect of various granular dusts generated from a work through irradiation of the work with a laser light.SOLUTION: An annular wall portion 21 composed of an annular outer wall portion 21b and a ceiling wall portion 21a is provided for an outer edge of a st...

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Bibliographische Detailangaben
Hauptverfasser:	NOMURA TORU, SHINOYAMA KAZUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To remove an adverse effect of various granular dusts generated from a work through irradiation of the work with a laser light.SOLUTION: An annular wall portion 21 composed of an annular outer wall portion 21b and a ceiling wall portion 21a is provided for an outer edge of a stage portion 11 of a work stage 10 and the stage portion 11 is provided with a plurality of exhaust ports 12 coupled to an exhaust mechanism. The exhaust mechanism, for instance, a pump or a fan, is coupled to the exhaust ports 12 through piping 22, and suctions air inside the annular wall portion 21. Granular dusts generated as a result of irradiation of a work 1 with laser light are jetted together with gas from an edge portion of the work to an internal space A sectioned by the annular outer wall portion 21b and the ceiling wall portion 21a, are swept by a stream toward the exhaust ports 12, and are exhausted through the exhaust ports 12 provided for the stage portion 11.