SUBSTRATE LEVITATION TRANSPORT METHOD AND SUBSTRATE LEVITATION TRANSPORT DEVICE AND SUBSTRATE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To improve consumption efficiency of high pressure gas for levitation while optimizing the levitation height or the position of a substrate in a levitation stage.SOLUTION: The levitation stage 10 in a resist coating apparatus sections the levitation surface of a carry-in region...

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Bibliographische Detailangaben
Hauptverfasser:	MIYAZAKI FUMIHIRO, INAMASU HISASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS SPRAYING OR ATOMISING IN GENERAL STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To improve consumption efficiency of high pressure gas for levitation while optimizing the levitation height or the position of a substrate in a levitation stage.SOLUTION: The levitation stage 10 in a resist coating apparatus sections the levitation surface of a carry-in region Mand a carry-out region Mextending backward and forward of a coating region Min the conveyance direction into a large number of levitation areas. A large number of ejection nozzles 12 are arranged on these levitation surfaces. Ejection pressure of high pressure gas in each levitation area is on-off controlled independently or variably by an ejection pressure control unit.