DEVICE AND METHOD FOR SUBSTRATE INSPECTION

PROBLEM TO BE SOLVED: To provide a device and a method for substrate inspection that can conduct substrate inspection without entry of a holding part of a substrate in an imaging area of an imaging unit, without causing scratches and dirt on the substrate, and without causing positional misalignment...

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Bibliographische Detailangaben
Hauptverfasser:	MIZUHARA MASASHI, WADA HIROMITSU, TAJIMA HISAYASU, KOYAMA YASUFUMI, HAMAKAWA NAOYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a device and a method for substrate inspection that can conduct substrate inspection without entry of a holding part of a substrate in an imaging area of an imaging unit, without causing scratches and dirt on the substrate, and without causing positional misalignment of the substrate.SOLUTION: A device and a method for substrate inspection for conducting inspection while holding a substrate to be inspected and transferring it in one direction comprise: a substrate transfer part constructed so as to comprise a first substrate transfer part that holds and transfers the substrate to let it pass over a light source and an imaging area of an imaging unit, and a second substrate transfer part that holds a portion of the substrate having passed between the light source and the imaging unit and transfers the substrate; and a substrate position detection part that detects the position of the substrate or the substrate transfer part in motion. The device and the method for substrate inspection conduct inspection of the substrate as jointly held and moved by the first substrate transfer part and the second substrate transfer part based on the detected position information.