FILM-FORMING METHOD AND OIL-REPELLENT BASE

PROBLEM TO BE SOLVED: To provide a film-forming method capable of manufacturing an oil-repellent base having an oil-repellent film with wear resistance for practical use.SOLUTION: The film-forming method successively includes a pre-irradiation step, a first film-forming step, a post-irradiation step...

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Bibliographische Detailangaben
Hauptverfasser:	SUGAWARA TAKUYA, SHIONO ICHIRO, NAGAE EKISHU, KYO YUSHO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL GLASS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a film-forming method capable of manufacturing an oil-repellent base having an oil-repellent film with wear resistance for practical use.SOLUTION: The film-forming method successively includes a pre-irradiation step, a first film-forming step, a post-irradiation step, and a second film-forming step. In the pre-irradiation step, a surface of a substrate 101 is irradiated with particles having energy for the irradiation time of 300-600 seconds. In the first film-forming step, a first film 103 with the thickness of ≥3 nm is formed on a particle irradiation surface of the substrate 101 after the pre-irradiation step by an ion assisted vapor deposition method using ion beams. In the post-irradiation step, the first film 103 formed on the substrate 101 is irradiated with particles having energy. Thus, the thickness of the first film 103 is set to be 0.1-500 nm, and unevenness satisfying the specified surface characteristics is formed on the surface of the first film 103. In the second film-forming step, an oil-repellent second film 105 is formed on an uneven surface of the first film 103 after the post-irradiation step.