POLISHING AGENT FOR CHEMICAL MECHANICAL POLISHING

PROBLEM TO BE SOLVED: To provide a polishing agent for CMP capable of suppressing occurrence of dishing, thinning, and polishing flaws in copper or copper alloy wiring, achieving high speed polishing for a barrier layer of tantalum, tantalum alloy, tantalum compound, or the like in low concentration...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TERASAKI HIROKI, IGARASHI AKIKO, UCHIDA TAKESHI, KAMIGATA YASUO, KURATA YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL DRESSING OR CONDITIONING OF ABRADING SURFACES DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NATURAL RESINS NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE PAINTS PERFORMING OPERATIONS POLISHES POLISHING POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH SEMICONDUCTOR DEVICES SKI WAXES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a polishing agent for CMP capable of suppressing occurrence of dishing, thinning, and polishing flaws in copper or copper alloy wiring, achieving high speed polishing for a barrier layer of tantalum, tantalum alloy, tantalum compound, or the like in low concentration of abrasive particles, and forming an embedded pattern of a metal film having high reliability, and to provide a method for polishing a substrate by using the agent.SOLUTION: The present invention provides a polishing agent for chemical mechanical polishing which comprises an oxidizing agent for a conductor, a protective film forming agent for protecting a metal surface, acid, and water, and in which the polishing agent has pH of 3 or less, and concentration of the oxidizing agent is 0.01 to 3 wt.%.