LEVITATION COATING APPARATUS

LEVITATION COATING APPARATUS

PROBLEM TO BE SOLVED: To adjust the height simply in a short time, in the re-assembly work of a levitation stage that can be disassembled.SOLUTION: In a levitation stage 10 of a resist coating apparatus, a stage block SBon the outlet side is attached onto an independently transportable trestle FLthr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIYAZAKI FUMIHIRO, INAMASU HISASHI
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
BASIC ELECTRIC ELEMENTS
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PERFORMING OPERATIONS
PHYSICS
SEMICONDUCTOR DEVICES
SPRAYING OR ATOMISING IN GENERAL
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
TRANSPORTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To adjust the height simply in a short time, in the re-assembly work of a levitation stage that can be disassembled.SOLUTION: In a levitation stage 10 of a resist coating apparatus, a stage block SBon the outlet side is attached onto an independently transportable trestle FLthrough a large number of posts 18 and adjusters 20. Three intermediate stage blocks SB, SB, SBare attached onto an independently transportable trestle FLthrough a large number of posts 22, 24, 26 and adjusters 28, 30, 32. A stage block SBon the outlet side is attached onto an independently transportable trestle FLthrough a large number of posts 34 and adjusters 36.