METHOD FOR MOLECULAR BONDING OF ELECTRONIC COMPONENTS ONTO POLYMER FILM
PROBLEM TO BE SOLVED: To produce three-dimensional structures where thick and/or thin chips are stacked on integrated element plates already formed, the structures being required by development of microelectronics, miniaturization of electronic components, and increasing complexity of electronic ass...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To produce three-dimensional structures where thick and/or thin chips are stacked on integrated element plates already formed, the structures being required by development of microelectronics, miniaturization of electronic components, and increasing complexity of electronic assemblies.SOLUTION: The invention relates to a method for molecular bridging of an electronic compound (6) to a polymer (4). According to the invention, the polymer (4) is coated with a bonding layer (5) such as silicon oxide. By the bonding layer (5), problems caused by the presence of hydrocarbons are removed. The method can be used to produce adhesive-free three-dimensional structures. |
---|