PROBE DEVICE AND METHOD FOR CLEANING TEST OBJECT

PROBLEM TO BE SOLVED: To prevent damage of a CF substrate by a cleaning device.SOLUTION: A probe device is arranged at an upper part of a test object with an electrode, and includes: a probe device body; a cleaning device coupled to the probe device body; and a coupling device coupling the cleaning...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NARAOKA SHUJI, OSANAI YASUAKI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To prevent damage of a CF substrate by a cleaning device.SOLUTION: A probe device is arranged at an upper part of a test object with an electrode, and includes: a probe device body; a cleaning device coupled to the probe device body; and a coupling device coupling the cleaning device to the probe device. The probe device body has the needle tip turned downward so as to be contacted with the electrode. The cleaning device includes the front end which can contact the electrode by relative movement in the vertical direction where the probe device body and the test object approach each other and separate from each other at a lower part and a front part from the needle tip. The coupling device relatively movably couples the cleaning device to the probe device in the diagonal direction where the upper part becomes the rear part.