SHAPE MEASUREMENT METHOD

PROBLEM TO BE SOLVED: To accurately measure the shape of a measurement object without being affected by vibrations and meanders of a shape measuring instrument itself.SOLUTION: A shape measurement method includes a measuring step (STP1) for measuring the shape of a measurement object about a height...

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Hauptverfasser: YAMAHIRA NAOFUMI, KODAMA TOSHIBUMI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To accurately measure the shape of a measurement object without being affected by vibrations and meanders of a shape measuring instrument itself.SOLUTION: A shape measurement method includes a measuring step (STP1) for measuring the shape of a measurement object about a height direction at the left and right sides simultaneously, a scanning step (STP2) for scanning the whole plane on the right side and the left side of the measurement object, a vibration eliminating step (STP3) for eliminating a short periodic component from right side measurement data and left side measurement data of the measurement object respectively independently, and a meander eliminating step (STP4) for using both the right side measurement data and the left side measurement data with the short periodic component eliminated therefrom to eliminate a long periodic component.